JPH055693Y2 - - Google Patents
Info
- Publication number
- JPH055693Y2 JPH055693Y2 JP2502684U JP2502684U JPH055693Y2 JP H055693 Y2 JPH055693 Y2 JP H055693Y2 JP 2502684 U JP2502684 U JP 2502684U JP 2502684 U JP2502684 U JP 2502684U JP H055693 Y2 JPH055693 Y2 JP H055693Y2
- Authority
- JP
- Japan
- Prior art keywords
- resonator
- coil
- output signal
- substrate
- input signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 38
- 239000013078 crystal Substances 0.000 claims description 12
- 229910052594 sapphire Inorganic materials 0.000 claims description 8
- 239000010980 sapphire Substances 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 230000009471 action Effects 0.000 claims description 4
- 230000001133 acceleration Effects 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 8
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000001259 photo etching Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2502684U JPS60136539U (ja) | 1984-02-23 | 1984-02-23 | メカニカル共振器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2502684U JPS60136539U (ja) | 1984-02-23 | 1984-02-23 | メカニカル共振器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60136539U JPS60136539U (ja) | 1985-09-10 |
| JPH055693Y2 true JPH055693Y2 (en]) | 1993-02-15 |
Family
ID=30519729
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2502684U Granted JPS60136539U (ja) | 1984-02-23 | 1984-02-23 | メカニカル共振器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60136539U (en]) |
-
1984
- 1984-02-23 JP JP2502684U patent/JPS60136539U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60136539U (ja) | 1985-09-10 |
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